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The Graphite System of the ESY-8

The LPE-technology of ESY-8 is based on a quartz-boat sliding-technique. The boat consists of 5 stacks, each containing a substrate-plate with 18 hollows for the substrates and melts, a movable slit-plate to cover the melt during layer-growth, and a crucible for the melt and poly-GaP. NH3 is added during layer-growth to dope the active layer with Nitrogen. The pn-junction and the p-layer is formed by evaporation of metallic Zinc-balls, which are injected into the reactor in adjustable quantities.