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ESY-10 TTT - Technical Highlights

LED-Leiste
  1. Single or Twin-System
  2. Vertical LPE Quartz Tube
  3. 3 Heating Zones
  4. Constant Temperature Flat-Zone: 250 mm
  5. Temperatures up to 1050°C
  6. Temperature Regulation Accuracy: ± 0.5 °C
  7. Minimum Need of Space in Cleanroom: 1.2 x 1.2 m2­ (Single Version)
  8. High Homogeneity of Layer-Thickness by Horizontal Layer-Growth
  9. Fully automatic Computer-Controlled Processing
  10. Data-Logging of all Process-Parameters
  11. Suitable for Multi-Layer Epitaxial Processes
  12. Suitable for Wafer Diameter up to 4"
  13. Flexible Adaptation of Wafer-Capacity
  14. Minimum 3 Wafers for Development
  15. Maximum 200 Wafers for Production