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ESY-8 - Technical Highlights

LED-Leiste
  1. Horizontal LPE Quartz Tube
  2. 5 Heating Zones
  3. Constant Temperature Flat-Zone: 600 mm
  4. Temperatures up to 1050 °C
  5. Temperature Regulation Accuracy: ± 0.5 °C
  6. Fully automatic Computer-Controlled Processing
  7. Data-Logging of all Process-Parameters
  8. Extremely homogeneous Doping by Using special Gas-Phase "Showering"-Technique
  9. Suitable for GaP:N Epitaxial Processes
  10. Suitable for Wafer Diameters up to 4"
  11. Cycle Time: 24 h