Telefon:
+49 (0)2403-508966
E-Mail:
#
 
Aktuelles

ESY-10 S - Technical Highlights

LED-Leiste
  1. Single or 2-Tube Combination-Furnace with Vertical LPE and Annealing Quartz Tube
  2. 3 Heating Zones for epitaxy and 1 independent heating Zone for Hg-source
  3. Hg-Vapor-Source inside Furnace Tube
  4. Temperatures up to 750°C
  5. Temperature Regulation Accuracy: ± 0.5 °C
  6. Suitable for Wafers up to 49cm 2
  7. 4 Wafers per Epitaxial Process
  8. Perfect Layer Growth
  9. Easy removing of Solid Melt after Process
  10. Wafer Surface Protection before and after Epi-Growth
  11. Fully automatic Computer-Controlled Processing
  12. Data-Logging of all Process-Parameters
  13. Closed loading glove box with N2-atmosphere